376.053 Optical Metrology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 3.0h, 4.5EC, to be held in blocked form


  • Semester hours: 3.0
  • Credits: 4.5
  • Type: VU Lecture and Exercise
  • Format: Online

Learning outcomes

After successful completion of the course, students are able to categorize optical metrology systems for the target physical quantity and choose a proper system based on requirements of the target application. For that, students are able to distinguish physical values measured by optics such as radiometry and photometry, and draw the structure and operation principle of basic optical components (laser, photodiodes, CCD, ...). Based on the physics and the basic components for optical metrology, students are able to design a complete optical metrology system such as laser Doppler Vibrometer, speckle interferometry, and lidar, explain the benefits and drawback of each optical metrology system, and justify the choice of the tool in various application examples.

After successful completion of the lab classes, student are able to build optical measurement systems (Michelson interferometry) from the basic optical components on an optical breadboard and calculated the target physical quantity from the measured data. In addition, students are able to operates the advanced optical metrology systems (laser Doppler Vibrometer, Thermal camera, wavefront sensor, and lidar) and demonstrate its advantages and limitations in various applications.

Michelson Interferometer wavefront sensor

Subject of course

Fundamentals of Measurement
Concept, SI units, uncertainty

Introduction to Optical Metrology
optical radiation, light, EM wave, spectrum

Detecting optical radiation
Radiometric and photometric quantities

Optical radiation as EM wave
Description, characteristics, polarization, light/matter interaction, dispersion, refraction, reflection, transmission

Radiation sources and optical radiation
Natural sources of radiation, thermal radiation

Optical temperature measurement
Pyrometers, thermal imaging

Properties, setup, types of lasers, Gaussian beam, coherence

Michelson, Mach-Zehnder and Sagnac interferometer Coherence-tomography

Semiconductor light sources and semiconductor laser
Photoelectric effect, photoelectric cell and photomultiplier, semiconductor detectors (diodes, PSD, CCD and CMOS), thermal detectors (QWIP, thermopile, bolometer, pyro-electric)

Speckle metrology and holography
Properties of laser speckle interferometer, speckle correlation, holographic interferometry

Optical flow measurement
Optical Doppler effect, Laser Doppler Anemometer, Particle Dynamics Analysis, Particle Image Velocimetry, Vibrometer, Schlieren optics

Light Detection and Ranging (LIDAR) 
Optical Ranging Principle, Reflection from Materials, SNR and performance, Scanning and Nonscanning LIDAR

Wavefront Sensing (WFS)
Diffraction Imaging, Principle, Aberration, Measurements

* The 4 days lab exercises are organized with two groups. Students will be asigned on either group A or B.

Teaching methods

The lecture is given as presentation to explain the fundamental physics for optical metrology, basic components of optical metrology, and various optical metrology tools.  For further experience of optical metrology tools, lab classes follow after the lectures.

Mode of examination


Additional information

This lecture is part of the Curriculum Masterstudium Energie- und Automatisierungstechnik and is held in the course of the elective module Precision Engineering. In order to complete the module, also the lecture 376.052 Nanometrology has to be visited.



Course dates

Fri09:00 - 13:0017.03.2023 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri09:00 - 13:0021.04.2023Seminarraum 127 Lecture
Fri09:00 - 13:0028.04.2023 - 12.05.2023 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri14:00 - 17:0028.04.2023 - 05.05.2023Messtechnik Labor Exercise
Thu15:00 - 18:0011.05.2023Messtechnik Labor Exercise
Tue09:00 - 11:0023.05.2023 ACIN Besprechungsraum, (CA 05 32)Lecture
Tue13:00 - 15:0023.05.2023 ACIN Besprechungsraum, (CA 05 32)Lecture
Tue15:00 - 18:0023.05.2023Messtechnik Labor Exercise
Optical Metrology - Single appointments
Fri17.03.202309:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri21.04.202309:00 - 13:00Seminarraum 127 Lecture
Fri28.04.202309:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri28.04.202314:00 - 17:00Messtechnik Labor Exercise
Fri05.05.202309:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Fri05.05.202314:00 - 17:00Messtechnik Labor Exercise
Thu11.05.202315:00 - 18:00Messtechnik Labor Exercise
Fri12.05.202309:00 - 13:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Tue23.05.202309:00 - 11:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Tue23.05.202313:00 - 15:00 ACIN Besprechungsraum, (CA 05 32)Lecture
Tue23.05.202315:00 - 18:00Messtechnik Labor Exercise
Course is held blocked

Examination modalities

Submission of a lab report, a written exam about the course materials (an oral exam instated upon request)


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Fri10:00 - 12:0017.05.2024 ACIN Computer lab (CA 04 26)written12.04.2024 08:00 - 16.05.2024 23:59TISSFinal Exam
Wed10:00 - 12:0029.05.2024 Computer Lab E376, CA0426written12.04.2024 00:00 - 28.05.2024 23:59TISSFinal Exam

Course registration

Begin End Deregistration end
31.01.2023 00:00 05.06.2023 09:00 05.06.2023 09:00


Study CodeObligationSemesterPrecon.Info
066 506 Energy Systems and Automation Technology Not specified
066 515 Automation and Robotic Systems Mandatory elective


No lecture notes are available.

Previous knowledge

Basic knowledge in optics and electrodynamics

Accompanying courses


  • Attendance Required!