After successful completion of the course, students are able to comprehend the materials presented in the lecture and to draw conclusions from them, as well as to actively communicate the contents presented during the lecture.

With respect to the lecture notes (in German language) the structure of the lecture is as follows:

1. Introduction (history of electron microscopy, explaination of various types of electron microscopes)
2. Electron optics (properties of an image, geometric optics of a sammellens, aberrations, resolution limits, aberration correction)
3. Scanning electron microscopy (construction, electron penetration in matter, imaging methods, environmental SEM, EBIC, 3D-SEM)
4. Transmission electron microscopy (contruction, electron sources, lens systems, detectors, sample preparation)
5. Imaging methods in TEM (electron diffraction, bright field, dark field, konematic diffraction theory, dynamic diffraction theory, phase contrast, HRTEM, Lorentz-microscopy, holography, tomography)
6. Simulation of HRTEM images (modeling of the specimen, exit wave, reconstruction methods)
7. scanning transmission electron microscopy (functional principles, detectors, imaging methods, differential phase contrast)
8. In-situ electron microscopy (in SEM, in TEM)
9. low-voltage electron microscopy (beam damage, mean free path length, SEM, TEM)
10. analytical electron microscopy (applications, inelastic electron-matter interactions, EELS, EDX, CL)

Frontal lecture

General Introduction of the lecture:

Tuesday, March 7th, 2023,  13:00-14:00

FH HS6

oral exaimnation or TUWEL-continous assesment

Lecture notes for this course are available in English. The lecture notes are further used for the  LVA 138.103 Techniken der analytischen Elektronenmikroskopie. A link for download the .pdf file will be sendt to all students interested in the lecture.

Solid State Physics