366.112 Selected topics on MEMS/NEMS technology, characterization and lab safety
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2024S, VO, 1.5h, 2.0EC, to be held in blocked form


  • Semester hours: 1.5
  • Credits: 2.0
  • Type: VO Lecture
  • Format: Blended Learning

Learning outcomes

After successful completion of the course, students are able to...

  • to behave properly and safely in laboratories
  • to behave correctly in the clean room and to explain the essential aspects of work in the clean room
  • understand basic microfabrication concepts
  • handle samples correctly, store and dispose of them correctly
  • recognize the dangers of working with chemicals and be able to work safely with chemicals accordingly
  • recognizing and avoiding dangers emanating from lasers
  • recognize and avoid dangers that arise when working with electrical measurement technology

Subject of course

  • Basic behavior in the laboratory / laboratory safety
  • Behavior in the clean room (clean room technology, clothing, particle sources, movement in the clean room, etc.)
  • Basic concepts of microfabrication (additive and subtractive processes, technology, lithography)
  • Sample handling (wafer handling, storage, singulation, hazards, disposal, etc.)
  • Chemicals (classification, hazards, safe working, PPE, disposal, etc.)
  • Working with lasers (how they work, classes, dangers, etc.)
  • Electrical measurement technology (dangers, basics, measurement methods, etc.)

Teaching methods

Frontal lecture / video recordings of frontal lecture

Mode of examination

Written and oral



Examination modalities

Performance is checked by a written test (either by hand or in the TUWEL) and by an oral final discussion.

To do this, please enroll in the TUWEL course yourself; the TUWEL exam can be taken at any time. For the oral exam, please send an email to michael.schneider@tuwien.ac.at.

Course registration

Not necessary


Study CodeObligationSemesterPrecon.Info
710 FW Elective Courses - Electrical Engineering Elective


No lecture notes are available.

Continuative courses