366.112 Selected topics on MEMS/NEMS technology, characterization and lab safety
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023W, VO, 1.5h, 2.0EC, to be held in blocked form


  • Semester hours: 1.5
  • Credits: 2.0
  • Type: VO Lecture
  • Format: Blended Learning

Learning outcomes

After successful completion of the course, students are able to...

  • to behave properly and safely in laboratories
  • to behave correctly in the clean room and to explain the essential aspects of work in the clean room
  • understand basic microfabrication concepts
  • handle samples correctly, store and dispose of them correctly
  • recognize the dangers of working with chemicals and be able to work safely with chemicals accordingly
  • recognizing and avoiding dangers emanating from lasers
  • recognize and avoid dangers that arise when working with electrical measurement technology

Subject of course

  • Basic behavior in the laboratory / laboratory safety
  • Behavior in the clean room (clean room technology, clothing, particle sources, movement in the clean room, etc.)
  • Basic concepts of microfabrication (additive and subtractive processes, technology, lithography)
  • Sample handling (wafer handling, storage, singulation, hazards, disposal, etc.)
  • Chemicals (classification, hazards, safe working, PPE, disposal, etc.)
  • Working with lasers (how they work, classes, dangers, etc.)
  • Electrical measurement technology (dangers, basics, measurement methods, etc.)

Teaching methods

Frontal lecture

Mode of examination

Written and oral



Course dates

Tue13:00 - 17:0016.01.2024 ISAS Meetingroom CD0112Lecture
Thu14:00 - 18:0018.01.2024 ISAS Meetingroom CD0112Lecture
Fri13:00 - 17:0019.01.2024 ISAS Meetingroom CD0112Lecture
Course is held blocked

Examination modalities

Performance is checked by a written test (either by hand or in the TUWEL) and by an oral final discussion.

Course registration

Begin End Deregistration end
02.10.2023 00:00 31.10.2023 23:59 31.10.2023 23:59

Registration modalities

Please register in TISS to be informed about dates. Since the LVA will be held in a blocked format, we will send out a date survey at the end of October via the news function in TISS.


Study CodeObligationSemesterPrecon.Info
710 FW Elective Courses - Electrical Engineering Elective


No lecture notes are available.

Continuative courses