Nanoelectromechanical systems (NEMS) have been developed for a bit more than two decades now. NEMS are the continuation of Microelectromechanical Systems (MEMS), which have become omnipresent helpers in smart phones, cars, watches, etc. The two driving forces for NEMS research have been improved sensor technology and fundamental research.
This course introduces the latest models and skills required to design and optimise nano electromechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The course covers the electrical and mechanical aspects of NEMS devices. The introduced mechanical models are also key to the understanding and optimisation of nanomechanical resonators used e.g. in optomechanics.
The course is based on the book:
S. Schmid, L. Villanueva, M. Roukes:
"Fundamentals of Nanomechanical Resonators";
Springer International Publishing, Switzerland, 2016, ISBN: 978-3-319-28689-1;
The course content is:
- 366.102-1: Euler-Bernoulli beam theory (book chapter 1)
- 366.102-2: Rayleigh's method applied to strings & effective parameters (book chapter 1)
- 366.102-3: Lumped-element model resonator (book chapter 1)
- 366.102-4: Nonlinear & coupled resonators (book chapter 1)
- 366.102-5: Energy loss to the environment (book chapter 2)
- 366.102-6: Damping dilution (book chapter 2)
- 366.102-7: Intrinsic damping (book chapter 2)
- 366.102-8: Mass responsivity (book chapter 3)
- 366.102-9: Force responsivity & responsivity of effective spring constant (book chapter 3)
- 366.102-10: Electrodynamic & electrostatic transduction (book chapter 4)
- 366.102-11: Piezoresistive, piezoelectric, thermoplastic, & optomechanic transduction (book chapter 4)
- 366.102-12: Amplitude noise (book chapter 5)
- 366.102-13: Frequency noise & oscillator circuits (book chapter 5)