366.090 Micro- and nanoelectromechanical systems
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021W, VO, 2.0h, 3.0EC

Course evaluation


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

  • to explain various materials and technologies of micro- and nano-systems technology as well as related fields such as power electronics in a comprehensive manner and to be able to analyze the corresponding characteristic features, advantages and disadvantages as well as application areas.
  • to critically discuss different concepts for the realization of micro- and nanostructured devices and to be able to analyze the corresponding features, advantages and disadvantages as well as application areas.
  • to analyze common industrial fields of applications.
  • to discuss critically research results and identify new research questions.

Subject of course

The course covers industry-relevant, actual topics in the field of micro- and nano systems technology, but also related fields, such as materials and technologies for power electronic devices. The high practical relevance is ensured by lectures given by industry representatives from the corresponding field. The presented application-specific MEMS / NEMS devices will then be discussed with respect to fabrication technologies, device performance, and their system integration capability. Specific technical challenges for integration into technically relevant systems such as automotive, aircraft, consumer goods are also covered.

Teaching methods


Mode of examination


Additional information




Course dates

Wed09:00 - 10:0020.10.2021 Link will be announced under "further information" in time (LIVE)Preliminary lecture
Fri09:30 - 11:3014.01.2022 Online (LIVE)Lecture Infineon
Mon10:00 - 12:0017.01.2022 Online (LIVE)Lecture Xarion Laser Acoustics, A
Mon10:00 - 12:0024.01.2022Seminarraum 366 Lecture TDK Berlin, D
Tue09:30 - 11:3025.01.2022 Online (LIVE)Lecture Infineon Villach, A
Tue14:00 - 16:0025.01.2022 Online (LIVE)Lecture USound, A
Wed10:00 - 12:0026.01.2022 Online (LIVE)Lecture Airbus Group, D
Wed15:00 - 17:0026.01.2022 Online (LIVE)Lecture Bosch, A
Thu09:30 - 11:3027.01.2022Seminarraum 366 Lecture Infineon Villach, A
Thu15:00 - 17:0027.01.2022 Online (LIVE)Lecture Infineon Villach, A
Fri09:00 - 11:0028.01.2022 Online (LIVE)Lecture EV Group, A

Examination modalities

Evaluation is done by oral exam after individual appointments.

Course registration

Begin End Deregistration end
07.10.2021 08:00 06.01.2022 23:59 06.01.2022 23:59



Slides will be available.