After successful completion of the course, students are able to...

• to explain various materials and technologies of micro- and nano-systems technology as well as related fields such as power electronics in a comprehensive manner and to be able to analyze the corresponding characteristic features, advantages and disadvantages as well as application areas.
• to critically discuss different concepts for the realization of micro- and nanostructured devices and to be able to analyze the corresponding features, advantages and disadvantages as well as application areas.
• to analyze common industrial fields of applications.
• to discuss critically research results and identify new research questions.

The course covers industry-relevant, actual topics in the field of micro- and nano systems technology, but also related fields, such as materials and technologies for power electronic devices. The high practical relevance is ensured by lectures given by industry representatives from the corresponding field. The presented application-specific MEMS / NEMS devices will then be discussed with respect to fabrication technologies, device performance, and their system integration capability. Specific technical challenges for integration into technically relevant systems such as automotive, aircraft, consumer goods are also covered.

Lecture

ATTENTION IMPORTANT:
Unfortunately, due to the current Corona situation, it is not possible for us to hold this course.
THEREFORE WE HAVE TO CANCEL THE COURSE FOR THE WS 2020 !!!!!

Evaluation is done by oral exam after individual appointments.