366.087 Actuators
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • … describe scaling effects on the micro scale and to explain the physics behind them.
  • … outline and discuss the basic mechnical equations.
  • … discuss and analyse the impact of layer stress onto micro systems.
  • … describe basic mechanical elements and to contrast advantages and disadvantages of those elements.
  • … describe electrostatic actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe electromagentic actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe piezoelectric actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe different types of resonators and to compare them to one another.
  • … explain shape memory alloys and to evaluate advantages and disadvantages.
  • … describe thermal actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … explain basic terms in micro fluidics and to apply simple modeling techniques.
  • … describe microfluidic pumps and to explain essential components.
  • … to explain acousto-fluidic effects and devices and to assess the range of applications.

Subject of course

Content of the lecture are various actuator principles and their implementation in MEMS devices. The corresponding impact on the device performance is presented and discussed, including scaling effects. The focus is on physical principles (e.g. electrostatic, magnetic and piezoelectric) as well as unconventional effects such as shape-memory alloys. Furthermore, basics of microfluidics are introduced for micromachined actuators operated in fluidic environments such as valves.

Teaching methods

The transfer of knowledge takes place primarily through frontal lectures, accompanied by a TUWEL course.

It is not necessary to register in TISS, please enroll in the TUWEL course yourself.

Mode of examination


Additional information

COVID-19 Hinweis: Es gelten grundsätzlich die Corona-Regeln der TU Wien (https://www.tuwien.at/tu-wien/corona).



Course dates

Wed09:00 - 11:0005.10.2022 - 25.01.2023Seminarraum 366 Lecture
Wed09:00 - 11:0019.10.2022Seminarraum 387 Lecture
Wed09:00 - 11:0009.11.2022Seminarraum 387 Lecture
Wed09:00 - 11:0021.12.2022 Link wird bekanntgegeben (LIVE)Lecture - ATTENTION Online
Actuators - Single appointments
Wed05.10.202209:00 - 11:00Seminarraum 366 Lecture
Wed12.10.202209:00 - 11:00Seminarraum 366 Lecture
Wed19.10.202209:00 - 11:00Seminarraum 387 Lecture
Wed09.11.202209:00 - 11:00Seminarraum 387 Lecture
Wed16.11.202209:00 - 11:00Seminarraum 366 Lecture
Wed23.11.202209:00 - 11:00Seminarraum 366 Lecture
Wed30.11.202209:00 - 11:00Seminarraum 366 Lecture
Wed07.12.202209:00 - 11:00Seminarraum 366 Lecture
Wed14.12.202209:00 - 11:00Seminarraum 366 Lecture
Wed21.12.202209:00 - 11:00 Link wird bekanntgegebenLecture - ATTENTION Online
Wed11.01.202309:00 - 11:00Seminarraum 366 Lecture
Wed18.01.202309:00 - 11:00Seminarraum 366 Lecture
Wed25.01.202309:00 - 11:00Seminarraum 366 Lecture

Examination modalities

Evaluation is done by online oral exam after individual appointments.

Course registration

Not necessary


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 504 Master programme Embedded Systems Mandatory elective
066 507 Telecommunications Mandatory elective
066 508 Microelectronics and Photonics Mandatory elective
066 515 Automation and Robotic Systems Mandatory elective


The presentation slides will be available as handouts.

Previous knowledge

Knowledge of VO Sensorik und Sensorsysteme (366.071) is useful.


if required in English