366.087 Actuators
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020W, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

  • … describe scaling effects on the micro scale and to explain the physics behind them.
  • … outline and discuss the basic mechnical equations.
  • … discuss and analyse the impact of layer stress onto micro systems.
  • … describe basic mechanical elements and to contrast advantages and disadvantages of those elements.
  • … describe electrostatic actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe electromagentic actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe piezoelectric actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … describe different types of resonators and to compare them to one another.
  • … explain shape memory alloys and to evaluate advantages and disadvantages.
  • … describe thermal actuators and to evaluate advantages and disadvantages as well as scopes of application.
  • … explain basic terms in micro fluidics and to apply simple modeling techniques.
  • … describe microfluidic pumps and to explain essential components.
  • … to explain acousto-fluidic effects and devices and to assess the range of applications.

Subject of course

Content of the lecture are various actuator principles and their implementation in MEMS devices. The corresponding impact on the device performance is presented and discussed, including scaling effects. The focus is on physical principles (e.g. electrostatic, magnetic and piezoelectric) as well as unconventional effects such as shape-memory alloys. Furthermore, basics of microfluidics are introduced for micromachined actuators operated in fluidic environments such as valves.

Teaching methods

This semester, knowledge transfer due to the Covid-19 situation is offered in a distance learning format. The inverted classroom is primarily used. This means that the lecture is made available as a recorded stream in TUWEL and that a video meeting (plenum) takes place every week in which open questions can be discussed. Between the lecture stream and plenum there will be time to collect questions anonymously via TUWEL, which will then also be discussed.

The TUWEL course will open on 28.09. In the beginning, there will be a short overview presentation and a short video, where I will summarize the approach to this course. The first regular lecture is unlocked on october 5th.

Signing up in TISS is not required, please sign youself up in TUWEL.

I offer an introduction meeting to answer your first questions regarding the methods used in this lecture. Since the group is typically relatively small (5-10 students), I am happy to accomodate wishes you have for the LVA. Another important goal of this first meeting is the definition of a time slot for the plenum.

Die Introduction takes place on Zoom:

Michael Schneider lädt Sie zu einem geplanten Zoom-Meeting ein.

Thema: Vorbesprechung 366.087 Aktorik
Uhrzeit: 5.Okt.2020 03:00 PM Wien

Zoom-Meeting beitreten

Meeting-ID: 969 8634 6578
Passwort: 0pXvYxwH
Schnelleinwahl mobil
+436703090165,,96986346578#,,#,34446957# Österreich
+43720115988,,96986346578#,,#,34446957# Österreich

Einwahl nach aktuellem Standort
        +43 670 309 0165 Österreich
        +43 72 011 5988 Österreich
        +43 12 535 501 Österreich
        +43 12 535 502 Österreich
Meeting-ID: 969 8634 6578
Passwort: 34446957
Ortseinwahl suchen: https://tuwien.zoom.us/u/aezbez6avt

Mode of examination




Course dates

Mon15:00 - 16:0005.10.2020 Zoom meeting, login data will be distributed beforehand (LIVE)Introduction

Examination modalities

Evaluation is done by online oral exam after individual appointments.

Course registration

Not necessary



The presentation slides will be available as handouts.

Previous knowledge

Knowledge of VO Sensorik und Sensorsysteme (366.071) is useful.


if required in English