366.086 Materials, processes and technologies for MEMS
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, VU, 2.0h, 3.0EC
TUWEL

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

... describe the different fabrication techniques of silicon carbide, evaluate their pro and cons as well as their field of application.

... evaluate the electrical and mechanical properties of silicon carbide with respect to other semiconductors.

... explain the process and functionalization techniques of silicon carbide and the corresponding technological challenges.

... name, rate and discuss the field of application of silicon carbide for power electronics and microsystems technology.

Subject of course

This course will focus on the carbide materials, especially on silicon carbide (SiC). SiC is a material of growing importance in the field of MEMS and microelectronic applications. The course is divided into the following chapters: 

Deposition techniques
Besides the production methods for bulk SiC, special techniques such as LPCVD and PECVD for the deposition of polycrystalline or amorphous SiC thin films as well as homo and hetero epitaxy for the deposition of single crystalline 4H-SiC and 3C-SiC layers will be covered. Doping of SiC with respect to microelectronic applications will be subject of the course as well.

Material properties
SiC exhibits extraordinary thermal, electrical, chemical, mechanical and structural properties, all of which will be presented. Additionally, advanced optical and electrical characterization methods such as DLTS will be explained.

Patterning and functionalization
Besides the well known methods for thin film patterning such as wet and dry etching, electrochemical techniques for porosification of SiC thin films will be a main focus. Furthermore, the biocompatible properties of SiC will be discussed.

Applications in microelectronics
In this chapter, the implementation of SiC into MOSFET/MESFET/JFET and diode structures will be discussed as well as the importance of SiC in regard to high power electronics and optoelectronics.

Applications in MEMS
Besides its use in electronics, SiC is increasingly used in MEMS devices due to its excellent mechanical and thermal properties. In this course, devices like SiC based MEMS sensors for harsh environments (for temperature, gas or pressure sensing) and micro hot plates for chemical sensors will be discussed.

Teaching methods

This course will be given in an online-format (Distance Learning). The knowledge transfer takes place primarily via a flipped classroom. Learning documents for independent study will be provided via a TUWEL-course. The learning progress and open question will be discussed in weekly Q&A online sessions. 

Mode of examination

Oral

Additional information

This course will be given in an online-format (Distance Learning). 

Required technical equipment for the course and the exam:

  • Device for participating in online meetings including audio and video transmitting function

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Tue08:00 - 09:0009.03.2021 https://tuwien.zoom.us/j/95914686093?pwd=WGpPaUh5T0ROY0JUK0ZTcm44Rm53QT09 PW: ju5UF0mJ (LIVE)Preliminary lecture
Tue08:00 - 09:0016.03.2021 - 01.06.2021 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGe (LIVE)Q&A
Materials, processes and technologies for MEMS - Single appointments
DayDateTimeLocationDescription
Tue09.03.202108:00 - 09:00 https://tuwien.zoom.us/j/95914686093?pwd=WGpPaUh5T0ROY0JUK0ZTcm44Rm53QT09 PW: ju5UF0mJPreliminary lecture
Tue16.03.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue23.03.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue13.04.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue20.04.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue27.04.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue04.05.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue11.05.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue18.05.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A
Tue01.06.202108:00 - 09:00 https://tuwien.zoom.us/j/97838917531?pwd=TjF6OXNvY04xRFJpM3U5a2VuTUFmQT09 PW: g2E3enGeQ&A

Examination modalities

Following the course, there will be an oral online exam.

Course registration

Begin End Deregistration end
01.03.2021 08:00 17.06.2021 23:59

Curricula

Literature

No lecture notes are available.

Language

English