366.074 Selected Topics - Microsensortechnology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023W, VU, 4.0h, 5.0EC, to be held in blocked form


  • Semester hours: 4.0
  • Credits: 5.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

  • elaborate on the basic processing steps for the fabrication of microstructures and devices.
  • single-handedly perform lithography processes.

Subject of course

The goal is the production and characterization of a piezoelectrically operated resonant microsensor that can be used to detect ambient pressure variations. Essential technological processing steps are done in the institute's own cleanroom facilities, enabling hands-on experience in cutting-edge deposition and patterning techniques (such as vapor deposition and sputtering, CVD, mask aligner, DRIE for very high aspect ratio deep etching) for microsensor fabrication. The devices are then examined using suitable microscopy methods (optical, scanning electron microscope). Subsequently, the microstructures are resonantly excited, characterized under a microsystem analyzer with laser Doppler vibrometer to determine mode shapes and resonance frequencies and compared to theoretical models. The dependence of the vibration behavior on the ambient pressure is recorded electrically by means of time-dependent impedance measurements and evaluated with common theoretical approaches. Theoretical fundamentals of the resonators and the technology are prepared by the students at the beginning of the VU under guidance and the results presented in short oral lectures.

Teaching methods

To prepare for the practical part, a prior theoretical section is held in the form of a seminar. Topics with relevance for the practical part are assigned to participants and prepared by them. During the seminar, participants then present their topic.

The practical part will take place under the guidance of supervisors in the laboratories and clean rooms of the ISAS.

Mode of examination

Written and oral

Additional information

Mandatory attendance!
Limited seats: 15 students

Please just register in group 1, the appointments will then take place individually. Registration will be activated on September 29th, 2022 at 10:00.



Course dates

Tue15:00 - 16:0003.10.2023Seminarraum 366 Vorbesprechung
Mon10:00 - 12:0016.10.2023Seminarraum 366 Seminar
Mon13:00 - 15:0016.10.2023Seminarraum 366 Seminar
Tue13:00 - 15:0017.10.2023Seminarraum 366 Seminar
Mon15:00 - 17:0030.10.2023Seminarraum 366 Einstiegstest
Course is held blocked

Examination modalities

At the beginning there is an entrance test, which has to be completed positively in order to participate in the LVA.
Both the introductory test, the seminar lecture as well as the active participation during the practical part are evaluated. A dedicated final exam will not take place.


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Thu - 19.12.2024writtenno application-Prüfung

Course registration

Use Group Registration to register.

Group Registration

GroupRegistration FromTo
Gruppe 128.09.2023 10:0002.10.2023 15:00


Study CodeObligationSemesterPrecon.Info
033 235 Electrical Engineering and Information Technology Mandatory elective
066 434 Materials Sciences Not specified


  • Veikko Lindroos: Handbook of Silicon Based MEMS Materials and Technologies
  • Marc Madou: Fundamentals of Microfabrication

Previous knowledge

The contents of the VO Sensorik and Sensor Systeme (366.071) is being expected.


  • Attendance Required!