After successful completion of the course, students are able to...

• ... elaborate on the basic processing steps for the fabrication of microstructures.
• ... single-handedly perform lithography processes.

The goal is the production and characterization of a piezoelectrically operated resonant microsensor that can be used to detect ambient pressure variations. Essential technological processing steps are done in the institute's own cleanroom facilities, enabling hands-on experience in cutting-edge deposition and patterning techniques (such as vapor deposition and sputtering, CVD, mask aligner, DRIE for very high aspect ratio deep etching) for microsensor fabrication. The devices are then examined using suitable microscopy methods (optical, scanning electron microscope). Subsequently, the microstructures are resonantly excited, characterized under a microsystem analyzer with laser Doppler vibrometer to determine mode shapes and resonance frequencies and compared to theoretical models. The dependence of the vibration behavior on the ambient pressure is recorded electrically by means of time-dependent impedance measurements and evaluated with common theoretical approaches. Theoretical fundamentals of the resonators and the technology are prepared by the students at the beginning of the VU under guidance and the results presented in short oral lectures.

To prepare for the practical part, a prior theoretical section is held in the form of a seminar. Topics with relevance for the practical part are assigned to participants and prepared by them. During the seminar, participants then present their topic.

The practical part will take place under the guidance of supervisors in the laboratories and clean rooms of the ISAS.

Announcement of ISAS free elective courses: Monday, 7 October 2019, 13.00 s.t., Hörsaal EI 4 (Reithoffer HS)

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LVA 366.074:
Mandatory attendance. Limited seats: 15 Students

At the beginning there is an entrance test, which has to be completed positively in order to participate in the LVA.

Both the introductory test, the seminar lecture as well as the active participation during the practical part are evaluated. A dedicated final exam will not take place.

• Veikko Lindroos: Handbook of Silicon Based MEMS Materials and Technologies
• Marc Madou: Fundamentals of Microfabrication

The contents of the VO Sensorik and Sensor Systeme (366.071) is being expected.