366.071 Sensor Systems
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, VO, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to ...

  • to explain fundamental MEMS-related deposition techniques for thin films (PVD, CVD), to evaluate their corresponding features, advantages and disadvantages as well as important application areas in devices.
  • to outline the basics of optical lithography and to describe relevant process steps in photolithography.
  • to comprehensively explain dry and wet-chemical etching processes used in MEMS, to analyze their corresponding features, advantages and disadvantages as well as application areas for device realization.
  • to analyze the advantages and disadvantages of the modeling of MEMS devices based on the finite element method.
  • to describe the main features of the finite element method.
  • to give an overview of typical physical sensors (strain, pressure, acceleration, yaw rate, flow, temperature).
  • to explain the basic principle of operation for typical physical sensors (strain, pressure, acceleration, rate of rotation, flow, temperature), to evaluate different realization concepts in MEMS devices and to analyze typical fields of application.
  • to describe MEMS sensor applications in automobiles (injector flow sensors, inertial sensors), to explain their functionality, to explain the advantages and disadvantages of these sensors and analyze the manufacturing requirements.
  • to explain the physical fundamentals of thermoelectric generators for energy harvesting and explain their application for self-powered sensor nodes in aircrafts.

Subject of course

The lecture is divided into 3 sections: in the first, key technologies for the realization of MEMS (micro electromechanical systems) sensors are presented. These include PVD (physical vapor deposition) and CVD (chemical vapor deposition) based thin film disposition techniques as well as fundamentals of optical lithography and etching. In addition, we present theoretical principles for modeling MEMS devices based on the finite element method. Furthermore, some examples are discussed to demonstrate the limits of FEM. In the second section, various realization concepts for MEMS are evaluated to sense physical quantities such as pressure, acceleration, rotation rate, flow and temperature. The fundamental principles of operation are explained, and typical application areas are introduced. In the third section, specific sensors for selected physical quantities and their integration into technical systems, such as automobiles or aircrafts, are introduced. Also actual research topics, such as the local energy supply of sensor nodes from the environment (energy harvesting), are addressed. It is the main goal of the lecture to provide to the students basic MEMS knowledge ranging from technology aspects via device realization to the system integration of selected MEMS sensor elements. The presentation and discussion of selected examples from actual research topics in the field of MEMS sensors as well as energy harvesting complete the lecture.

Teaching methods


Mode of examination


Additional information

ATTENTION: The lecture on December 21, 2022 will take place ONLINE

Ulrich Schmid lädt Sie zu einem geplanten Zoom-Meeting ein.  
Thema: LV Sensorik und Sensorsysteme - Flusssensoren
Uhrzeit: 21.Dez. 2022 08:15 AM Amsterdam, Berlin, Rom, Stockholm, Wien  

Zoom-Meeting beitreten

Meeting-ID: 970 7657 2505



Course dates

Wed08:00 - 10:0005.10.2022 - 18.01.2023EI 2 Pichelmayer HS - ETIT Lecture
Wed08:00 - 10:0021.12.2022 (LIVE)Lecture - Attention: Online
Sensor Systems - Single appointments
Wed05.10.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed12.10.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed19.10.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed09.11.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed16.11.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed23.11.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed30.11.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed07.12.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed14.12.202208:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed21.12.202208:00 - 10:00 Lecture - Attention: Online
Wed11.01.202308:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture
Wed18.01.202308:00 - 10:00EI 2 Pichelmayer HS - ETIT Lecture

Examination modalities

Multiple opportunities during the academic year for written exams.


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Wed15:00 - 17:0013.12.2023EI 8 Pötzl HS - QUER written04.09.2023 08:00 - 11.12.2023 23:59TISSPrüfung 2022 W
Wed15:00 - 17:0024.01.2024EI 8 Pötzl HS - QUER written02.10.2023 08:00 - 22.01.2024 23:59TISSPrüfung 2022W
Wed11:00 - 13:0026.06.2024EI 2 Pichelmayer HS - ETIT written15.01.2024 08:00 - 24.06.2024 23:59TISSHauptprüfung 2024S

Course registration

Not necessary


Study CodeObligationSemesterPrecon.Info
033 235 Electrical Engineering and Information Technology Mandatory5. Semester
066 434 Materials Sciences Not specified
066 453 Biomedical Engineering Not specified
066 460 Physical Energy and Measurement Engineering Mandatory elective
066 504 Master programme Embedded Systems Not specified1. Semester


Lecture slides are available in TISS.

Further literature:

U. Mescheder:
    Konzept und Anwendungen
    Teubner-Verlag, Stuttgart
    ISBN 3-519-06256-9

G. Gerlach, W. Dötzel
    Grundlagen der Mikrosystemtechnik
    Hanser Verlag, München
    ISBN 3-446-18395-7

W. Menz, J. Mohr:
    Mikrosystemtechnik für Ingenieure
    VCH, Weinheim
    ISBN: 3-527-294055-8

M. Madou:
    Fundamentals of Microfabrication
    CRC Press, Boca Raton
    ISBN: 0-8493-9451-1