After successful completion of the course, students are able to ...
The lecture is divided into 3 sections: in the first, key technologies for the realization of MEMS (micro electromechanical systems) sensors are presented. These include PVD (physical vapor deposition) and CVD (chemical vapor deposition) based thin film disposition techniques as well as fundamentals of optical lithography and etching. In addition, we present theoretical principles for modeling MEMS devices based on the finite element method. Furthermore, some examples are discussed to demonstrate the limits of FEM. In the second section, various realization concepts for MEMS are evaluated to sense physical quantities such as pressure, acceleration, rotation rate, flow and temperature. The fundamental principles of operation are explained, and typical application areas are introduced. In the third section, specific sensors for selected physical quantities and their integration into technical systems, such as automobiles or aircrafts, are introduced. Also actual research topics, such as the local energy supply of sensor nodes from the environment (energy harvesting), are addressed. It is the main goal of the lecture to provide to the students basic MEMS knowledge ranging from technology aspects via device realization to the system integration of selected MEMS sensor elements. The presentation and discussion of selected examples from actual research topics in the field of MEMS sensors as well as energy harvesting complete the lecture.
IMPORTANT:
Due to the new regulations for future face-to-face exams, we are planning - from June to September 2020 - to offer several written exam dates with a smaller number of participants.In the next few weeks, these dates will be coordinated at the faculty and will be advertised in TISS from the end of May / beginning of June.
Multiple opportunities during the academic year for written exams.
Application is currently locked manually.
Die Vortragsfolien stehen als Handouts zur Verfügung.
Further literature:
U. Mescheder: Mikrosystemtechnik Konzept und Anwendungen Teubner-Verlag, Stuttgart ISBN 3-519-06256-9G. Gerlach, W. Dötzel Grundlagen der Mikrosystemtechnik Hanser Verlag, München ISBN 3-446-18395-7W. Menz, J. Mohr: Mikrosystemtechnik für Ingenieure VCH, Weinheim ISBN: 3-527-294055-8M. Madou: Fundamentals of Microfabrication CRC Press, Boca Raton ISBN: 0-8493-9451-1