362.178 Processing chemistry for Micro- and Nanoelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 2.0h, 3.0EC, to be held in blocked form

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

... to understand the course of chemical processes as the interaction of valence electrons.
... apply basic chemical knowledge to processes in semiconductor manufacturing.
... to calculate the necessary mass flows for chemical processes
... adjust buffer solutions with a desired pH value
... to understand redox reactions and exchange reactions as the basis of etching.
... estimate the solubility of substances as a consequence of their protic / aprotic and polar / apolar properties. ... correctly assess the dangers of chemicals in cleanrooms.
Basic knowledge of chemistry (compound classes, stoichiometric composition, acids / bases, RedOx reactions, thermodynamics, reaction kinetics, functionality of organic groups, nomenclature of organic compounds) will be ragained and applied onon examples from microstructuring (etching, lithography, cleaning with solvents, duration of reactions, mixing ratios of 2 reaction partners) .

Subject of course

Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase

Teaching methods

 

Blocked "immersion" course in chemistry -

Case examples will be solved in small groups and together with the lecturere.
A paractical lab course focusing on safety with chemical processes will be offered.

Lecture dates in SS2023

Wed. 01.03.2023 - 14h-17h
Thur. 02.03.2023 - 14h-17h
Fri.    03.03.2023 - 15h-17h

Wed. 08.03.2023 - 14h-17h

Mon. 13.03.2023 - 14h-17h
Thur 16.03.2023 - 14h-17h
Fri     17.03.2023 - 15h-17h

Wed. 22.03.2023 - 14h-17h
Thur  23.03.2023 - 14h-17h

Wed. 29.03.2023 - 14h-17h
Thur  30.03.2023 - 14h-17h

Mode of examination

Oral

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
14:00 - 18:0001.03.2023 - 31.03.2023Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Processing chemistry for Micro- and Nanoelectronics - Single appointments
DayDateTimeLocationDescription
Wed01.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Thu02.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Fri03.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Mon06.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Tue07.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Wed08.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Thu09.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Fri10.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Mon13.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Tue14.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Wed15.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Thu16.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Fri17.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Mon20.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Tue21.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Wed22.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Thu23.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Fri24.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Mon27.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Tue28.03.202314:00 - 18:00Besprechungsraum 362 - 2 Processing Chemistry - Lecture
Course is held blocked

Examination modalities

Oral exam with sample calculations on chemical processes (stoichiometry, calculating pH value, calculating electrochemical potential)

Course registration

Begin End Deregistration end
30.01.2023 10:00 12.03.2023 23:00 29.03.2023 23:00

Registration modalities

For better planning please register in TISS.

The lecture will start at the beginning of the semester and will be held blocked,

Curricula

Study CodeObligationSemesterPrecon.Info
066 508 Microelectronics and Photonics Not specified

Literature

No lecture notes are available.

Previous knowledge

The course will start at high-school level.

Accompanying courses

Language

if required in English