362.152 Materials, processes and technologies of microelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

...describe novel transistor architectures and technologies to minimize short channel effects and enhance scalability.
...correctly apply mechanical strain to engineer carrier mobilities and enhance transistor performence.

... combine the current technological concepts of MOSFET manufacturing
... identify future trends of the International Roadmap for Devices and Systems
... describe alternative logic components (e.g. spin-FETs, Nanomagnet Logic)
... understand alternative uses for bioelectronic applications

...compare continuum and atomistic models in process simulation.
...select a simulation method for a problem of process simulation.
...describe the most important simulation methods.

Subject of course

New materials, processes, and devices as seen by the ITRS Roadmap
Introduction to Computational Materials Science with applications in semiconductor technology
Own research results (nanomagnetologic, FIB simulation)

Teaching methods

Lectures with digital presentations

Mode of examination


Additional information

Erste Vorlesung: 20.4.2023, Beginn 9:30 pünktlich



Course dates

Thu11:00 - 12:0009.03.2023Seminarraum 362 - 1 Introduction
Thu09:00 - 14:0020.04.2023 - 01.06.2023Seminarraum 362 - 1 Lecture
Thu09:30 - 14:0022.06.2023Seminarraum 362 - 1 Ersatztermin
Thu09:30 - 14:0029.06.2023Seminarraum 362 - 1 Ersatztermin
Materials, processes and technologies of microelectronics - Single appointments
Thu09.03.202311:00 - 12:00Seminarraum 362 - 1 Introduction
Thu20.04.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu27.04.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu04.05.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu11.05.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu25.05.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu01.06.202309:00 - 14:00Seminarraum 362 - 1 Lecture
Thu22.06.202309:30 - 14:00Seminarraum 362 - 1 Ersatztermin
Thu29.06.202309:30 - 14:00Seminarraum 362 - 1 Ersatztermin
Course is held blocked

Examination modalities

Oral exam. The oral exam consists of parts with each lecturer. At the end of the course exam dates will be offered, if possible, where all parts of the exam can be taken. After that, dates may be arranged with the lecturers individually.

Course registration

Begin End Deregistration end
27.02.2023 00:00 20.04.2023 23:59


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 434 Materials Sciences Not specified
066 508 Microelectronics and Photonics Mandatory elective


No lecture notes are available.

Preceding courses