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362.152 Materials, processes and technologies of microelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022S, VU, 2.0h, 3.0EC, to be held in blocked form


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to...

...describe novel transistor architectures and technologies to minimize short channel effects and enhance scalability.
...correctly apply mechanical strain to engineer carrier mobilities and enhance transistor performence.

... combine the current technological concepts of MOSFET manufacturing
... identify future trends of the International Roadmap for Devices and Systems
... describe alternative logic components (e.g. spin-FETs, Nanomagnet Logic)
... understand alternative uses for bioelectronic applications continuum and atomistic models in process simulation. a simulation method for a problem of process simulation.
...describe the most important simulation methods.

Subject of course

New materials, processes, and devices as seen by the ITRS Roadmap
Introduction to Computational Materials Science with applications in semiconductor technology
Own research results (nanomagnetologic, FIB simulation)

Teaching methods

Lectures with digital presentations

Mode of examination




Course dates

Thu11:15 - 12:0010.03.2022 Zoom meeting via TUWEL (LIVE)Introduction
Thu10:00 - 14:0028.04.2022 - 09.06.2022Seminarraum 362 - 1 Lecture
Materials, processes and technologies of microelectronics - Single appointments
Thu10.03.202211:15 - 12:00 Zoom meeting via TUWELIntroduction
Thu28.04.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Thu05.05.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Thu12.05.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Thu19.05.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Thu02.06.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Thu09.06.202210:00 - 14:00Seminarraum 362 - 1 Lecture
Course is held blocked

Examination modalities

Oral exam

Course registration

Begin End Deregistration end
28.02.2022 00:00 28.04.2022 23:59



No lecture notes are available.

Preceding courses