362.152 Materials, processes and technologies of microelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, VU, 2.0h, 3.0EC
Lecture TubeTUWEL


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • LectureTube course
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

...describe novel transistor architectures and technologies to minimize short channel effects and enhance scalability.
...correctly apply mechanical strain to engineer carrier mobilities and enhance transistor performence.

... combine the current technological concepts of MOSFET manufacturing
... identify future trends of the International Roadmap for Devices and Systems
... describe alternative logic components (e.g. spin-FETs, Nanomagnet Logic)
... understand alternative uses for bioelectronic applications

...compare continuum and atomistic models in process simulation.
...select a simulation method for a problem of process simulation.
...describe the most important simulation methods.

Subject of course

New materials, processes, and devices as seen by the ITRS Roadmap
Introduction to Computational Materials Science with applications in semiconductor technology
Own research results (nanomagnetologic, FIB simulation)

Teaching methods

Lectures with digital presentations

Mode of examination




Course dates

Thu11:00 - 12:0011.03.2021 Zoom meeting via TUWEL (LIVE)Introduction
Thu10:30 - 14:0015.04.2021 - 27.05.2021 Zoom meeting via TUWEL (LIVE)Lecture
Materials, processes and technologies of microelectronics - Single appointments
Thu11.03.202111:00 - 12:00 Zoom meeting via TUWELIntroduction
Thu15.04.202110:30 - 14:00 Zoom meeting via TUWELLecture
Thu22.04.202110:30 - 14:00 Zoom meeting via TUWELLecture
Thu29.04.202110:30 - 14:00 Zoom meeting via TUWELLecture
Thu06.05.202110:30 - 14:00 Zoom meeting via TUWELLecture
Thu20.05.202110:30 - 14:00 Zoom meeting via TUWELLecture
Thu27.05.202110:30 - 14:00 Zoom meeting via TUWELLecture

Examination modalities

Oral exam

Course registration

Begin End Deregistration end
31.01.2021 00:00 29.04.2021 23:59



No lecture notes are available.

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