After successful completion of the course, students are able to..

.. apply basic principles of chemistry to the processes of microfabrication
... understand the chemical processes for etching, deposition, cleaning in process technology
... independently mix a buffered hydrofluoric acid acid from the individual components
... independently design processes for electrode deposition of copper layers (V, A, duration)
... select gas flows for dry processes according to the reaction stoichiometry
... to work on wet workbenches in the clean room with acids, alkalis and solvents

Theory:
Chemical concepts (pH, electrochemistry, reaction mechanisms, ... and much more), thermodynamics, kinetics,
Microfabrication processes (lithography, RIE, CVD, ...), which are based on chemical processes.

Application:
Calculation examples for gas processes, etching processes, equilibrium reactions, etc.

Experimental exercise:
Safe handling of chemicals (acids, solvents, gases)

Lecture supported with ppt slides and blackboard drawings

Application of chemical principles to everyday issues
Application of the chemical principles to questions of semiconductor technology
Joint development of chemical formulas and reaction equations
Common physico-chemical calculations

** ATTENTION Please register for LVA in TISS ***

Scheduling Meeting: 02.03.2020 - 15h - Sem 362-2

The lecture exercise “Process Chemistry” will be held as a BLOCK LECTURE in SS2020.
In SS2020, the lecture will be arranged as agreed at the preliminary meeting on March 2nd, 2020 from March 3rd. until 11.03. in the morning from 9 am to 1 pm.
The exact schedule will be determined in the planning session on March 2nd, 2020 together with all students present.  Location:  NanoCenter - Building CH

                 Gusshausstrasse 25a
                 Seminar room 2nd floor

In SS2020

For the lecture: Please bring your pocket calculator!

Participation in interactive lessons, pre-calculation of examples on the blackboard, repetition of lessons

Finally oral interview with bi to 3 calculation examples

TISS-Registration unlocks access to support material for this lecture

Knowledge of Lithography, CVD, RIE