After successful completion of the course, students are able to..

.. apply basic principles of chemistry to the processes of microfabrication
... understand the chemical processes for etching, deposition, cleaning in process technology
... independently mix a buffered hydrofluoric acid acid from the individual components
... independently design processes for electrode deposition of copper layers (V, A, duration)
... select gas flows for dry processes according to the reaction stoichiometry
... to work on wet workbenches in the clean room with acids, alkalis and solvents

Concepts in chemistry (pH, electrochemistry, reaction mechanisms,.....)Thermodynamics, kinetics, Fabrication processes (lithography, RIE, CVD,...) requiring chemistry in Micro- and Nanoengineering Safety with chemicals (acids, solvents, gases)mittel, Gase

Lecture supported with ppt slides and blackboard drawings

Application of chemical principles to questions of everyday life
Application of chemical principles to issues of semiconductor technology
Joint development of chemical formulas and reaction equations
Joint development of general chemical and physico-chemical calculations

The lecture "Process Chemistry" will be held as blocked Course in WS2020/21 on the following days:

** ATTENTION Please register for LVA in TISS ***

Location:  NanoCenter - Building CH
                 Gusshausstrasse 25a
                 Seminar room 2nd floor

Please bring your pocket calculator!

Participation in interactive lessons, pre-calculation of examples on the blackboard, repetition of lessons

Finally oral interview with bi to 3 calculation examples

Please register in TISS for better manegability.

Knowledge of Lithography, CVD, RIE