362.148 Nanoelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, VU, 2.0h, 3.0EC
Quinn ECTS survey


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Hybrid

Learning outcomes

After successful completion of the course, students are able to understand the basic properties of low-dimensional electron systems, as well as the operation of modern, nanostructured devices. But beware: this topic is complex and therefore unsuitable for students from lower semesters.

Subject of course

This lecture provides an introduction to the physical properties of semiconductor devices in the nanometer range and to the physics of low-dimensional electron systems. A section on manufacturing processes of nanostructures teaches the basics of electron beam lithography, laser holography and reactive ion etching. In the section on electronic properties of nanostructures, effects relevant for the use in future devices are discussed, e.g. single electron transistors, sub-µm tunnel diodes or transistors with modulated gate regions. To understand the characteristics of such nanostructures, lateral and vertical transport effects are discussed. Lateral transport is mainly used to determine the energy levels in nanostructures. Individual methods are explained in detail, including ballistic transport effects. Vertical transport is mainly related to the physical properties of tunnel diodes in the nanometer range. Here, nanostructuring leads to selection rules for tunnel processes, which has a significant influence on the characteristic curves of these diodes. Numerical methods for modelling these systems are also presented. 

Teaching methods

Please read the lecture note 'Haegrula II', and understand it (german only)


Mode of examination




Examination modalities

Oral Examination.

Course registration

Begin End Deregistration end
02.10.2022 00:00

Registration modalities

Bitte anmelden, damit ich weiss, mit wie vielen Leuten ich rechnen kann, DANKE!


Beste Grüße, Jürgen Smoliner


Study CodeSemesterPrecon.Info
066 508 Microelectronics and Photonics


No lecture notes are available.