362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020W, VO, 2.0h, 3.0EC
TUWEL

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Hybrid

Learning outcomes

After successful completion of the course, students are able to...

to name all major manufacturing processes of micro- & nano-structuring and to explain the principles. The students learn to compare different production processes and to weigh the pros and cons critically. This LVA gives students the understanding to develop process sequences for the complete production of components of microelectronics, photonics and microsystems technology by combining the learned manufacturing processes independently.

Subject of course

Comprehensive knowledge of the processes and technologies that form the basis for modern nanoelectronics, nanophotonics and microsystems technology. Elemental and compound semiconductor of group IV and III-V and oxide ceramics are the focus on the material side.

Process technologies for the manufacture of micro- and nano-scale, 1-, 2- and 3-dimensional structures, components and devices. Primary concerns are the key processes including layer structure with photo- and electron beam lithography and etching techniques with RF plasma processes, selective growth processes for (quasi-) 1-, 2- dimensional structures such as nanodots and nanowires, and in-situ and ex-situ Characterization methods.

Teaching methods

Lecture supported with ppt slides and blackboard drawings
Narratives from the practice of industrial production
Case examples for application
Joint development of process sequences (process integration) for the production of a microelectronic or micromechanical device

Mode of examination

Oral

Additional information

2020 the lecture will be held as ONLINE-Lecture (ZOOM).
The first lecture is scheduled for 6. Oct. 2020 at 13h-15h

Heinz Wanzenböck lädt Sie zu einem geplanten Zoom-Meeting ein.

Thema: 362.144 VO Prozesstechnologien
Uhrzeit: Jede Woche am Di 13h - 15h - erste Vorlesung 6.Okt.2020
 

Zoom-Meeting beitreten
https://tuwien.zoom.us/j/96373215637?pwd=NkxyRjBoejdqMTZ2SFJUR0UxUU1EQT09

Meeting-ID: 963 7321 5637
Passwort: micro4you

Schnelleinwahl mobil
+43720115988,,96373215637#,,#,726280387# Österreich
+4312535501,,96373215637#,,#,726280387# Österreich

Einwahl nach aktuellem Standort
        +43 12 535 501 Österreich
        +43 670 309 0165 Österreich
Meeting-ID: 963 7321 5637
Passwort: 726280387
Ortseinwahl suchen: https://tuwien.zoom.us/u/a667O3zVr

 

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Presence lectures in old days were given:
13:00 - 15:00

Besprechungraum ISAS (CB0102)
Gebäudeteil Favoritenstrasse - 2. Stock


         
         

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Tue13:00 - 15:0006.10.2020 - 26.01.2021 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik - Single appointments
DayDateTimeLocationDescription
Tue06.10.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue13.10.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue20.10.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue27.10.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue03.11.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue10.11.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue17.11.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue24.11.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue01.12.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue15.12.202013:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue12.01.202113:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue19.01.202113:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies
Tue26.01.202113:00 - 15:00 Meetingroom ISAS, Gusshausstrasse 27-29, Room CB0102, (Wing: CB- Favoritenstrasse, 1. floor)362.144: Processing technologies

Examination modalities


Oral exam

The examination of the full lecture content can be taken at each of the lecturers - registration with the chosen examiner.

Examiner Wanzenböck:
Registration for given dates via TISS
Additional dates available on request at any time -
Appointments via alexandra.linster@tuwien.ac.at

Examiner Ulrich Schmid:
Dates by individual agreement

Examiner Gottfried Strasser:
Dates by individual agreement

Exams

DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Wed15:00 - 16:0010.11.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral18.10.2021 12:00 - 09.11.2021 12:00TISSMi 10.11.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Wed15:00 - 16:0024.11.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral27.10.2021 12:00 - 23.11.2021 12:00TISSMi 24.11.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0006.12.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral08.11.2021 12:00 - 05.12.2021 12:00TISSMo 06.12.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Tue15:00 - 16:0021.12.2021 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral23.11.2021 12:00 - 20.12.2021 12:00TISSDi 21.12.2021 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0010.01.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral13.12.2021 12:00 - 09.01.2022 12:00TISSMo 10.01.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0031.01.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral03.12.2021 12:00 - 30.01.2022 12:00TISSMo 31.01.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Wed15:00 - 16:0016.02.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral19.01.2022 12:00 - 15.02.2022 12:00TISSMi 16.02.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik
Mon15:00 - 16:0028.02.2022 https://tuwien.zoom.us/j/91273694137?pwd=R0RraFJ3d3hTeTd6QzhHbUgwRGhSQT09oral31.01.2022 12:00 - 27.02.2022 12:00TISSMo 28.02.2022 - 15h ORAL EXAM (Zoom) - 362.144 Prozesstechnologien der Mikroelektronik, Photonik und der Mikrosystemtechnik

Course registration

Begin End Deregistration end
04.09.2020 09:00 05.11.2020 12:00

Curricula

Literature

No lecture notes are available.

Accompanying courses

Continuative courses

Language

if required in English