362.136 Selected Topics - Microelectronic Devices Lab-course
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021S, VU, 4.0h, 5.0EC


  • Semester hours: 4.0
  • Credits: 5.0
  • Type: VU Lecture and Exercise
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to...

to carry out sdlected processes in semiconductor technology and semiconductor device characterization. Nan opdevices are included. ...


Subject of course

Processes in semiconductor technology (lithography, structuring, metallization, etc.)

Characterization measurements on semiconductor structures and devices .

Spatially resolved measurements in the nanometer range (AFM, STM)

Electrical characterization of electronic and optoelectronic components.


Teaching methods

First there will be a 6-week lecture block in which you will learn the necessary basics, then there will be a test. Then a full-day laboratory exercise in groups of 3 is carried out. There are currently 3 different experiments available. You can freely choose your favourite experiment, but the motto is "first come, first served".

Mode of examination

Written and oral



Examination modalities

A protocol must be made.

Course registration

Begin End Deregistration end
06.03.2021 00:00 30.04.2021 00:00 05.07.2021 00:00

Group Registration

GroupRegistration FromTo
Gruppe 222.03.2021 00:00
Gruppe 322.03.2021 00:00
Gruppe 422.03.2021 00:00
Gruppe 722.03.2021 00:00
Gruppe 822.03.2021 00:00
Gruppe 922.03.2021 00:00
Gruppe 1022.03.2021 00:00
Gruppe 1109.04.2021 00:00
Sammelgruppe 004.03.2021 00:00



Die Vorlesungsunterlagen (Skriptum, Handouts der Folien) weden kurzfristig zur Verfügung gestellt.

Previous knowledge

Completed courses in "Halbleiterphysik" and "Technische Elektronik" are strongly recommended.


  • Attendance Required!