After successful completion of the course, students are able to...
to carry out sdlected processes in semiconductor technology and semiconductor device characterization. Nan opdevices are included. ...
Processes in semiconductor technology (lithography, structuring, metallization, etc.)
Characterization measurements on semiconductor structures and devices .
Spatially resolved measurements in the nanometer range (AFM, STM)
Electrical characterization of electronic and optoelectronic components.
First there will be a 6-week lecture block in which you will learn the necessary basics, then there will be a test. Then a full-day laboratory exercise in groups of 3 is carried out. There are currently 3 different experiments available. You can freely choose your favourite experiment, but the motto is "first come, first served".
A protocol must be made.
Use Group Registration to register.
Die Vorlesungsunterlagen (Skriptum, Handouts der Folien) weden kurzfristig zur Verfügung gestellt.
Completed courses in "Halbleiterphysik" and "Technische Elektronik" are strongly recommended.
