Advanced understanding and experience in semiconductor technology.

In an introductory series of lectures the basics of the MOSFET, the processing steps, the operation of semiconductor equipment, and the role of simulation are reviewed. In the main part MOSFETs are fabricated in the cleanroom using the equipment of the institute. The electrical characteristics of the final device are taken with a wafer prober. Process and device simulation is performed using industry-standard TCAD tools.

The contents of this lecture presented in the winter term ("Nanotechnology") has been moved to the lectures "Materials, Processes and Technologies of Microelectronics", "Materials, Processes and Technologies of Photonics", and "Semiconductor Process Modeling". The contents of the lecture presented in the summer term ("MOSFET") has been canceled.