362.085 Process technologies for microelectronic devices Canceled
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2015S, VO, 2.5h, 4.0EC


  • Semester hours: 2.5
  • Credits: 4.0
  • Type: VO Lecture

Aim of course

Basics of semiconductor technologies in the production of devices. From the wafer to the working device. The main goal of this lecture is to offer the basic understanding of the various technological steps to produce semiconductor devices (electronic and optoelectronic devices.

Subject of course

Basic technologies in semiconductor fabrication. The various steps necessary to produce different eletronic / optoelectronic semiconductor devices will be discussed. Epitactical methods, definition of structures, structuring, transfer of structures, insulation, contacting techniques.

Additional information

No lecturers were assigned to this lecture.

The lecture is therefore cancelled.





Examination modalities

Oral exam (Heinz Wanzenböck) - Registration for stated dates via TISS.

Additional exam dates or dates with Alois Lugstein maybe arranged upon request - Contact silvia.pflug@tuwien.ac.at

Course registration

Begin End Deregistration end
07.03.2015 00:00 06.07.2015 00:00 06.07.2015 00:00

Registration modalities

Interested students please contact our secretary before the lecture starts


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
066 439 Microelectronics Not specified2. Semester
066 453 Biomedical Engineering Mandatory elective
066 460 Physical Energy and Measurement Engineering Mandatory elective


No lecture notes are available.

Accompanying courses

Continuative courses