362.084 Semiconductor Technology Labcourse
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, UE, 2.0h, 3.0EC
Quinn ECTS survey


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to ...

to understand the basic methods of semiconductor fabrication and / or analysis techniques for semiconductor devices.

through own experimental activities to grasp the principle of the techniques. to carry out microelectronics experiments after previous training

For physicists and chemists, this lab course offers the opportunity to gain practical experience in the cleanroom technology of microfabrication.

Subject of course

Laboratory work on structuring and characterization techniques in semiconductor manufacturing


Work program of the group WEBER

One focus of the group is new reconfigurable devices with programmable functionality, such as a transistor structure with multiple gate electrodes, di, depending on the wiring of the control electrodes, can operate as a transistor, AND logic or inverter, etc., details can be found here:


The laboratory schedule is based on the current needs of the ongoing research, and ranges from (delicate) characterization measurements with state of the art equipment to clean room activities. You can find out what can be done in detail during the internship by email from masiar.sistani@tuwien.ac.at.


Work program of the Group LUGSTEIN : on request


Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional): 
x) optical lithography and PVD metal deposition for cell culture microchip * 
x) direct writing of metal structures (Local CVD with a focused electron beam) * 
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures * 
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.) 
x) other topics available on request


Teaching methods

Basic practical knowledge in semiconductor technology

Duration: 3-day internship (other times available on request)
Start: by individual appointment (also possible during the holidays)
Group: max. 3 students

Grade: based on a laboratory report


Mode of examination


Additional information

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

or    masiar.sistani@tuwien.ac.at



Course dates

Mon13:00 - 14:0003.10.2022Seminarraum 362 - 1 Lab exercise -INFO MEETING

Examination modalities

Lab protocol

Group dates

Group A1 (Wanzenboeck)Mon14:00 - 18:0019.09.2022 CHEG - Nano-Center - Foyer EG >> ReinRaum362.084 Semiconductor Technology Labcourse Group A1 (Wanzenboeck)
Group A1 (Wanzenboeck)Tue10:00 - 18:0020.09.2022 CHEG - Nano-Center - Foyer EG >> ReinRaum362.084 Semiconductor Technology Labcourse Group A1 (Wanzenboeck)
Group A2 (Wanzenboeck)09:00 - 18:0030.01.2023 - 31.01.2023 CHEG - Nano-Center - Foyer EG362.084 Semiconductor Technology Labcourse Group A2 (Wanzenboeck)

Course registration

Begin End Deregistration end
14.09.2022 09:00 30.11.2022 21:00 30.11.2022 21:00

Registration modalities

Institut für Festkörperelektronik, Floragasse 7 - 1 Stock, Seminarraum 1 Ort: Vorbesprechung

Group Registration

GroupRegistration FromTo
Group A1 (Wanzenboeck)01.09.2022 06:0031.10.2022 23:55
Group A2 (Wanzenboeck)31.08.2022 06:0030.11.2022 23:55
Gruppe B (Lugstein)31.08.2022 09:0002.02.2023 22:00
Gruppe C1 (Sistani)31.08.2022 09:0002.02.2023 22:00
Gruppe C2 (Sistani)29.09.2022 00:00
Gruppe C3 (Sistani)29.09.2022 00:00



No lecture notes are available.

Previous knowledge

Lecture process technology 362.144 recommended.

Accompanying courses

Continuative courses


  • Attendance Required!