362.084 Semiconductor Technology Labcourse
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021W, UE, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to ...

to understand the basic methods of semiconductor fabrication and / or analysis techniques for semiconductor devices.

through own experimental activities to grasp the principle of the techniques. to carry out microelectronics experiments after previous training

For physicists and chemists, this lab course offers the opportunity to gain practical experience in the cleanroom technology of microfabrication.

Subject of course

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group WEBER : 

Electrical charactarization of Ge-Nanostructures - Details on request

Work program of the Group LUGSTEIN : 

Research-guided investigations of ultrascale electrical, optical and plasmonic devices.

The actual work program depends on the current research work of the research group.


Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional): 
x) optical lithography and PVD metal deposition for cell culture microchip * 
x) direct writing of metal structures (Local CVD with a focused electron beam) * 
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures * 
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.) 
x) other topics available on request


Teaching methods

Basic practical knowledge in semiconductor technology

Duration: 3-day internship (other times available on request)
Start: by individual appointment (also possible during the holidays)
Group: max. 3 students

Grade: based on a laboratory report


Mode of examination


Additional information

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

or    masiar.sistani@tuwien.ac.at



Course dates

Mon14:00 - 14:3004.10.2021 https://tuwien.zoom.us/j/94561979696Lab exercise - Wanzenboeck - INFO MEETING

Examination modalities

Lab protocol

Group dates

Group A1 (Wanzenboeck)09:30 - 18:0016.11.2021 - 18.11.2021 CHEG - Nano-Center - Foyer EG >> Clean Room362.084 Semiconductor Technology Labcourse Group A1 (Wanzenboeck)
Group A2 (Wanzenboeck)09:00 - 18:0020.12.2021 - 22.12.2021 CHEG - Nano-Center - Foyer EG362.084 Semiconductor Technology Labcourse Group A2 (Wanzenboeck)
Gruppe A3 (Wanzenboeck)11:00 - 19:0020.01.2022 - 21.01.2022Besprechungsraum 362 - 2 362.084 UE Semiconductor Technology Labcourse - Gruppe A3 (Wanzenboeck)

Course registration

Begin End Deregistration end
15.09.2021 09:00 01.12.2021 21:00 01.12.2021 21:00

Registration modalities

Institut für Festkörperelektronik, Floragasse 7 - 1 Stock, Seminarraum 1 Ort: Vorbesprechung

Group Registration

GroupRegistration FromTo
Group A1 (Wanzenboeck)15.09.2021 06:0001.11.2021 23:55
Group A2 (Wanzenboeck)01.09.2021 06:0001.12.2021 23:55
Gruppe A3 (Wanzenboeck)01.09.2021 09:0003.02.2022 22:00
Gruppe B (Lugstein)01.09.2021 09:0003.02.2022 22:00
Gruppe C1 (Sistani)01.09.2021 09:0003.02.2022 22:00
Gruppe C2 (Sistani)30.09.2021 00:00
Gruppe C3 (Sistani)30.09.2021 00:00



No lecture notes are available.

Previous knowledge

Lecture process technology 362.144 recommended.

Accompanying courses

Continuative courses


  • Attendance Required!