362.084 Semiconductor Technology Labcourse
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2020W, UE, 2.0h, 3.0EC
TUWEL

Properties

  • Semester hours: 2.0
  • Credits: 3.0
  • Type: UE Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to ...

to understand the basic methods of semiconductor fabrication and / or analysis techniques for semiconductor devices.

through own experimental activities to grasp the principle of the techniques. to carry out microelectronics experiments after previous training

For physicists and chemists, this lab course offers the opportunity to gain practical experience in the cleanroom technology of microfabrication.


Subject of course

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group WEBER : 

Electrical charactarization of Ge-Nanostructures-Details on request


Work program of the Group LUGSTEIN : on request

 

Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional): 
x) optical lithography and PVD metal deposition for cell culture microchip * 
x) direct writing of metal structures (Local CVD with a focused electron beam) * 
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures * 
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.) 
x) other topics available on request

 

Teaching methods

Basic practical knowledge in semiconductor technology

Duration: 3-day internship (other times available on request)
Start: by individual appointment (also possible during the holidays)
Group: max. 3 students

Grade: based on a laboratory report

 

 

Mode of examination

Written

Additional information

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

or    oder   walter.weber@tuwien.ac.at

Lecturers

Institute

Course dates

DayTimeDateLocationDescription
Mon14:00 - 14:3005.10.2020Besprechungsraum 362 - 2 Lab exercise - Wanzenboeck - INFO MEETING

Examination modalities

Lab protocol

Group dates

GroupDayTimeDateLocationDescription
Gruppe A (Wanzenboeck)11:00 - 19:0014.01.2021 - 15.01.2021 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 UE Semiconductor Technology Labcourse - Gruppe A (Wanzenboeck)
Gruppe B (Lugstein)09:00 - 17:0015.02.2021 - 16.02.2021 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 UE Semiconductor Technology Labcourse - Gruppe B (Lugstein)
Gruppe C (Wanzenboeck)09:00 - 17:0017.02.2021 - 18.02.2021 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 Semiconductor Technology Labcourse Gruppe C (Wanzenboeck)
Gruppe D (Lugstein)09:00 - 17:0022.02.2021 - 23.02.2021 Treffpunkt - Nano-Center 2.Stock Besprechungsraum 352362.084 Semiconductor Technology Labcourse - Group D (Lugstein)

Course registration

Begin End Deregistration end
24.09.2020 09:00 04.02.2021 21:00

Registration modalities

Institut für Festkörperelektronik, Floragasse 7 - 1 Stock, Seminarraum 1 Ort: Vorbesprechung

Group Registration

GroupRegistration FromTo
Gruppe A (Wanzenboeck)24.09.2020 09:0004.02.2021 22:00
Gruppe B (Lugstein)24.09.2020 09:0004.02.2021 22:00
Gruppe C (Wanzenboeck)05.01.2021 22:0004.02.2021 22:00
Gruppe D (Lugstein)05.01.2021 22:0004.02.2021 22:00

Curricula

Literature

No lecture notes are available.

Previous knowledge

Lecture process technology 362.144 recommended.

Accompanying courses

Continuative courses

Miscellaneous

  • Attendance Required!

Language

German