After successful completion of the course, students are able to ...

to understand the basic methods of semiconductor fabrication and / or analysis techniques for semiconductor devices.

through own experimental activities to grasp the principle of the techniques. to carry out microelectronics experiments after previous training

For physicists and chemists, this lab course offers the opportunity to gain practical experience in the cleanroom technology of microfabrication.

Laboratory work on structuring and characterization techniques in semiconductor manufacturing

Work program of the Group LUGSTEIN
on request

Work program of the group WANZENBOECK

Processing techniques of research-related areas (optional):
x) optical lithography and PVD metal deposition for cell culture microchip *
x) direct writing of metal structures (Local CVD with a focused electron beam) *
x) Topographic (AFM) and chemical (EDX) characterization of nanostructures *
x) Electrical characterization of microstructures (eg from Elekronenstrahlinduzierter deposition.)
x) other topics available on request

Basic practical knowledge in semiconductor technology

Duration: 3-day internship (other times available on request)
Start: by individual appointment (also possible during the holidays)
Group: max. 3 students

Grade: based on a laboratory report

LVA is carried out in 3 groups.
There are several courses offered by appointment during the semester.

Registration required (preferably in groups of 2-3 students) by email.

to     alois.lugstein@tuwien.ac.at

or     heinz.wanzenboeck@tuwien.ac.at

Lab protocol

Institut für Festkörperelektronik, Floragasse 7 - 1 Stock, Seminarraum 1 Ort: Vorbesprechung

Lecture process technology 362.144 recommended.