362.060 Labcourse on silicon technology
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2022W, PR, 8.0h, 8.0EC


  • Semester hours: 8.0
  • Credits: 8.0
  • Type: PR Project
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to ...

... carry out experimental research work on semiconductor materials / processes / devices under supervision
... to understand selected manufacturing methods for semiconductor devices and to apply them experimentally.
... to understand selected analysis methods for semiconductor devices and to evaluate experimental data.
... combine the applied methods and develop them independently.
... to understand requirements for diploma theses in the field of semiconductor technology
... to make a qualified decision to continue working on the research topic underway as part of a Master's thesis

Subject of course

In this internship, students will be introduced to the key technologies of modern silicon technology. After a safety training, the trainees are introduced to work under clean room conditions and get to know the handling of media and machines of silicon technology. In addition, they acquire the necessary basic knowledge to characterize materials of semiconductor technology and the electrical characterization of electronic components on the chip or wafer level. The completion of the work is an internship work, which has a self-contained theme to the goal in which the acquired knowledge can be used.

Teaching methods

personal 1: 1 conversations, independent study of literature, 1: 1 device training, independent experimental work, writing a scientific report

Mode of examination


Additional information

Intensive laboratory exercise - partly in the clean room / parallel with assistants - ideal preparation for a further diploma thesis



Examination modalities

intirinsic, oral


Course registration

Not necessary


Study CodeObligationSemesterPrecon.Info
066 434 Materials Sciences Not specified
710 FW Elective Courses - Electrical Engineering Elective


Stanley Wolf, Silicon Processing for the VLSI Era, Vol. I, Process Technology, 1990, Lattice Sunset Beach, Ca, ISBN 0-961672-4-5 Stanley Wolf, Silicon Processing for the VLSI era, Vol. II, Process Integration, 1986, Lattice Sunset Beach, Ca, ISBN 0-961672-3-7 S.M. Sze, VLSI Technology, 1993, Mc Graw Hill Book D. Widmann, H. Mader, H. Friedrich, Technologie hochintegrierter Schaltungen, 1996, Springer

Preceding courses