360.232 Process Reliability in Microelectronics
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2023S, VU, 2.0h, 3.0EC


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VU Lecture and Exercise
  • Format: Presence

Learning outcomes

After successful completion of the course, students are able to

  • describe material and structural degradation mechanisms in modern 3D integrated circuits.
  • physically model device degradation.
  • optimize the reliability of integrated circuits by using TCAD software packages.

Subject of course

Fundamentals of metallization and interconnect manufacturing, mechanical and electrical degradation, evaluation methodology of reliability aspects, statistical analysis of the failure behavior, studies on microstructural aspects of polycrystalline metallization, mechanical degradation of the inter-metal dielectric, reliability problems of interconnect structures for 3D integration (through-silicon-vias / solder bumps), the physical basis of electromigration and stressmigration, modeling of electromigration and stressmigration, TCAD analysis of electromigration and stressmigration as well as the optimization of metallization and interconnect structures.

Teaching methods

Lectures, in-depth study of a subtopic with subsequent presentation.

Mode of examination


Additional information

Time and Location:
Tuesday, 14:00 - 16:00
Seminar room E360, Gußhausstraße 27-29, Stiege 1, 5th floor, room no. CD 0520
Preliminary talk and begin: March 8th, 2023



Examination modalities

Oral test after positive submission of the seminar work.


DayTimeDateRoomMode of examinationApplication timeApplication modeExam
Mon16:00 - 18:0021.10.2024 CD 0519oral14.10.2024 20:00 - 20.10.2024 23:00TISSMündliche Prüfung Oktober

Course registration

Begin End Deregistration end
06.02.2023 20:00 05.03.2023 23:00 05.03.2023 23:00


Study CodeObligationSemesterPrecon.Info
066 504 Master programme Embedded Systems Not specified
066 508 Microelectronics and Photonics Not specified


No lecture notes are available.