138.030 Technology of thin films
This course is in all assigned curricula part of the STEOP.
This course is in at least 1 assigned curriculum part of the STEOP.

2021W, VO, 2.0h, 3.0EC

Course evaluation


  • Semester hours: 2.0
  • Credits: 3.0
  • Type: VO Lecture
  • Format: Distance Learning

Learning outcomes

After successful completion of the course, students are able to comprehend the materials presented in the lecture and to draw conclusions from them, as well as to actively communicate the contents presented during the lecture.

Subject of course

General: The lecture focuses on the practical aspects of modern physical and chemical deposition techniques. Special emphasis is laid on the large number of practical applications (e. g. surface engineering, wear reduction optics and micro-electronics) of thin film deposition methods. Timetable: Deposition techniques and their physical fundamentals; empirical theory of thin film formation; applications of thin films

Teaching methods

Frontal Lecture

Mode of examination


Additional information

Vorbesprechung: Montag, 4. Oktober 2021, 12:00-13:00 Uhr, via ZOOM-Meeting:



1. Vorlesung mit weiteren organisatorischen Details: 

Technologie Dünner Schichten - Einheit 1: Einleitung und Überblick

Fr., 8. Okt. 2021 09:00 - 10:00 (CEST)





Examination modalities


Course registration

Begin End Deregistration end
17.09.2021 10:00

Registration modalities

To have access to the lecture nogtes and to the curren ZOOM llinks please register to this lecture.



Lecture notes for this course are available. Institut für Festkörperphysik, Dr. Christoph Eisenmenger-Sittner Price: 7.0. Lecture notes and slides can be downloaded from https://static.ifp.tuwien.ac.at/homepages/Personen/duenne_schichten/ , sub category "Teaching"